High temperature piezo film thermometer

The high temperature thin film thermometer includes a thin film thermocouple and a resistance temperature detector (RTD). Thin-film thermocouples can be used at 1 000 °C, but the thermocouples drift due to the oxidation of germanium in the thin film. A layer of alumina protective piezo disc transducer can be sputtered to reduce the oxidation of germanium; Pt-13 Rh/Pt thin-film thermocouples Due to different processing techniques, the maximum operating temperature range is 900 °C ~ 1 200 °C; NiCr-NiMn thin-film thermocouples are used to measure the temperature of the gas turbine engine's low pressure turbine guide vane, the maximum operating temperature of piezo disc crystal is 400°C;

Thermocouples are generally used to measure transient temperatures up to a maximum operating temperature of 800 °C. Tungsten/thorium thin-film thermocouples require a protective layer at high temperatures for normal operation and 2Mhz piezo discs crystal can operate at a temperature of 1370 K under protective layer protection; Ni The Ni/Cr thin-film thermocouple can be used to monitor the cutting temperature and can work below 890 K. Ni/Cr and Ni-Al alloy thin-film thermocouples can monitor the temperature of the manufacturing process and are used at room temperature to 600 °C; Pt/ Pd thin-film thermocouples of piezoelectric plate sensor are used to monitor the heat treatment temperature of silicon wafers and can survive at 850 °C for 10-20 h. As an oxide ceramic, ITO ceramic material has characteristics of high temperature resistance, oxidation resistance, and ITO ceramic film composed of different electrode materials.