Thin film thermocouple made of piezo ceramic material

Thermocouples of piezoelectric material piezos discs transducer can withstand the large differences in the temperature and heat output. A thin-film thermocouple is consisting of two ITO piezo ceramic by hot electrodes (with different charge carrier concentrations) .which can operate below 1 200 °C; In2O3/ITO thin-film thermocouples are fabricated on a nickel-base alloy substrate can be used at a temperature of 1 000°C. it is working under conditions; thermocouples are consisting of In2O3:SnO2 (mass fraction 95%:5%) and In2O3 .which have large thermoelectric output, good stability and repeatability from room temperature to 1 300°C. And durability, survival time of piezoelectric effect sensor exceeds 50 h; thermoelectric output of ITO/Pt thin film thermocouples is stable from room temperature to 1 200°C; after nitrogen doping in the ITO, high temperature stability will be improved, nitrogen is dopped ITO Thermocouples made of platinum and platinum can withstand temperatures up to 1 000 °C, piezo transducer has greater thermoelectric output than S-type thermocouples, and have better stability in the room temperature to 1 000°C by NiCoCrAlY/alumina nanocomposites .Thermocouples made of nitrogen-doped ITO have a large heat output and can operate below 1 200 °C.

Thin-film thermocouples are made of other piezo ceramic materials can withstand the limited maximum operating temperatures. The thermoelectric output data of CrSi2/Pt thin film thermocouples from room temperature to 650°C is linear, while the thermal output data of TaC/Pt thin film thermocouples from room temperature to 450 °C is linear. Thin-film thermocouples are made of SiC (CMC) and platinum have a large seebeck coefficient, which is two orders of magnitude is higher than that of the K-type linear thermocouple, but when the temperature is higher than 1 000 °C, silicides are formed at the interface between Pt and SiC. Can only be used below 1 000 °C; TiC/TaC thin-film thermocouples of piezos discs transducercan be used at vacuum temperatures of 1 350 K. The resistance temperature of thin film detector is mainly composed of a metal or piezo ceramic material and has a relatively simple structure. Platinum thin-film RTDs typically operate the ranging temperatures from 20 °C to 700 °C. Gold thin-film RTDs of piezoelectric plate sensors can measure temperatures from 20 °C to 450 °C. RTDs are made from ITO can be used below 900 °C, piezo ceramics materials of thin-film RTDs are made of SiAlCN,it can operate stably for a long period of time below 1 400 °C.