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Research status of alumina piezo ceramic grinding and polishing technology

Views: 16     Author: Site Editor     Publish Time: 2018-09-02      Origin: Site

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The comparison test between A120 ordinary grinding and ultrasonic grinding was carried out under the different vibration modes. The primary and secondary order of the influence of various grinding process parameters on the surface roughness of the workpiece was studied, and the workpiece rotation speed, feed rate, grinding depth and generator were analyzed. The influence of different piezo ceramic sensor such as power on surface roughness. The comparison test results show that ultrasonic vibration grinding is an efficient processing method for hard and brittle materials such as piezo ceramics. Through the ultrasonic grinding and mechanical grinding comparison test of piezo ceramics, the influence of various processing parameters on the grinding surface quality was studied. Studies have shown that when the ultrasonic vibration direction is parallel to the creep feed direction, the surface roughness value can be reduced, when the ultrasonic vibration direction is perpendicular to the creep feed direction, it is not conducive to the improvement of the machined surface in the ultrasonic grinding processing.which mode is to improve the surface quality, a lower feed rate, a smaller grinding depth ,a suitably high grinding speed and a compound feed grinding method should be used. 


The relationship between the surface roughness of piezo ceramics and its microstructure was studied by studying the variation of surface roughness of piezo ceramics after four different microstructures.The results show that the particle size of the abrasive and the microstructure of the material determines the surface roughness of the HIFU piezoelectric element material. In general, the smaller abrasive grain size and piezo ceramic size, the higher is the surface roughness. When the abrasive particle size falls to the same level as the ceramic grain size. the key factor is determining the surface roughness of the piezo ceramic material is the size and number of pores on the surface of the material. The denser material, the higher is the accuracy of the surface roughness after processing. The performance and removal mechanism of high-purity alumina piezo ceramics were studied. The precision grinding experiments of high-purity alumina piezo ceramics were carried out by grinding machine. 


The spherical surface processing method and the processing of high purity alumina piezo ceramics were verified. The effect is achieved by finishing high-purity alumina piezo ceramics. The process flow of ultra-precision machining of 700mm piezo ceramic guide was put forward. The process method of parameters and detection method of the guide rail polishing by ultra-precision guide rail grinding and polishing machine developed by ourselves were detailed, and the optical processing of the PZT material piezoelectric ceramic guide rail was realized. The maximum peak valley value of the shape error is 0.78, and the RMS value of the surface error.


Single and double-side grinding and polishing experiments were carried out on alumina acoustic piezoelectric tubes substrates, mainly discussing the processing parameters such as abrasive type, abrasive particle size, grinding pressure, grinding rotation speed, slurry flow rate and abrasive concentration of abrasive liquid in different processing methods. The influence of material has removal rate, surface roughness and surface topography was analyzed. The material removal mechanism was analyzed. By optimizing the grinding and polishing process, a smooth surface with nanometer surface roughness was obtained.


 Aiming at the discoloration problem of alumina piezoelectric ceramic products substrates after grinding process, the root cause and pollution source of surface discoloration of alumina piezo ceramic substrates after grinding were analyzed. The solution to the problem of discoloration of alumina piezo ceramic substrate was proposed.

Through the processing experiment and EDS spectrum detection, the effects of adding anti-rust agent to the polishing liquid,piezoelectric electrode piezoelectric crystal is improving the material removal rate, using the iron-free grinding disc and the trimming ring on the grinding process of the alumina piezo ceramic substrates were verified. The correctness of the three schemes was analyzed and the mechanism of action was analyzed.


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