grinding and polishing technology of piezo ceramic transducer

The preparation has processing methods, processing difficulties,grinding and polishing of piezo ceramic transducer substrates. According to the principle of single-side grinding,double-side grinding and characteristics of grinding and polishing, the piezo ceramic substrates was efficiently thinned .The effects of various parameters in the ultra-smooth polishing process were analyzed and experimental research was carried out to meet the requirements of high-efficiency thinning and nano-scale surface roughness of ceramic substrates. At the same time, the phenomenon that the surface of the piezo ceramic substrate was yellowed after grinding in a certain processing environment was studied. The reason of the yellowing of the piezo ceramic substrate after grinding was analyzed. The three schemes were proposed and experimentally analyzed. The effect of the surface grinding effect is verified, and the correctness of the three schemes is verified and the mechanism of action is explained to effectively solve the problem of yellowing of the surface of the custome piezoelectric disks substrate after grinding. Piezo ceramic substrates will turn yellow when the surface is polished under the certain processing conditions, which is related to the presence of iron contamination in the processing environment. The iron pollution source is iron material, wherein the double-sided ground iron pollution is mainly the upper and lower cast iron grinding discs, and the single-side grinding iron pollution is a cast iron piezo disc.

The reason why the surface color of the piezoelectric tubular transducer turns yellow is that the abrasive particles are slightly crushed and removed during the grinding process, so that the iron is separated from the iron material and escapes into the polishing liquid in the dispersed state, and The flow of the slurry migrates to the surface of the alumina piezo ceramic substrate, and the iron reacts under the certain medium conditions (water, air, etc.), and the resulting of yellow iron oxide adsorbs covers the surface of the alumina piezo ceramic substrate, After polishing, the surface of the alumina piezo ceramic substrate turned yellow. The rust inhibitor is added to the polishing liquid can block the anodic process of dissolving the iron metal on the one hand, thereby inhibiting the chemical action; on the other hand, it can dissolve the substance covering the surface of the alumina piezo ceramic substrate, thus the escape of the surface of the piezo ceramic substrate,which can solve the problem of yellowing of the surface of the alumina ceramic substrate.