Single-side ground alumina piezo ceramic substrate

On the one hand, in order to remove the abrasive into between the grinding disc and the workpiece, HIFU piezo ceramics have the effect of recycling the abrasive, it is necessary to groove the grinding piezo surface, and different groove structures have different effects on the grinding processing effect. The cast iron piezo disc surface adopts a fine annular groove. The groove of this structure can keep the polishing liquid on the grinding disc surface to a large extent without escaping, and there are more abrasive particles at the same slurry flow rate. It acts on the grinding workpiece to make the surface material removal rate higher after grinding; while the piezo ceramic grinding disc surface adopts the structure of the cross groove, the groove of this structure allows most of the abrasive to fill inside the groove and rotate with the grinding disc. In the grinding action area, only a small amount of abrasive acts between the grinding piezo surface and the grinding workpiece, so that only a small amount of abrasive particles act on the grinding workpiece at the same slurry flow rate, so that the surface material removal rate after grinding is low.On the other hand, the cast iron piezo disc is softer than the grinding workpiece. The abrasive is mainly embedded in the surface of the cast iron grinding disc to perform micro-cutting removal on the grinding workpiece. The removal rate of HIFU piezo transducer surface material is high, and the removal mechanism has a damage area on the surface. the surface roughness Ra after grinding is lower; while the ceramic disk is harder than the abrasive workpiece, the abrasive mainly produces three-body rolling friction between the grinding disk and the workpiece, and the removal rate of surface material is low.

The damage area generated on the surface is large, and the surface roughness Ra after polishing is also high. For the high intensity focused piezo surface hole region, regions 2, 3 and 4 are ceramic surface regions, which are impurity regions of the piezo ceramic surface. The surface of the alumina piezo ceramic does not contain Fe element, which indicates that the surface of the alumina piezo ceramic has no iron or corresponding contaminant residue after single-side grinding on the cast iron grinding disc; it can be seen that the surface area of the alumina piezo ceramic does not contain Fe element. It is said that iron which migrates from the surface of the cast iron grinding disc to the surface of the piezo ceramic substrate, and yellow contaminants which are chemically applied and covered on the piezo ceramic surface are mechanically removed and escaped by grinding. It can be seen that the white matter-like impurities are distinct from the polished alumina piezo ceramic surface, and are impurities that have not been thoroughly removed and cleaned, and the element types contained therein contain Mg, Si and Fe elements in addition to the O and Al elements. Impurities can be removed by subsequent grinding and polishing processes and ultrasonic cleaning.